The NanoCMM has the following characteristics:
- Horizontal air bearing system with separate stress frames for preload forces
- Elastically guided vertical axis (stiffness- and weight compensated)
- Material of the machine base and moving bodies: aluminum (Al51St)
- Size: 450 x 450 x 200 mm
- Measuring volume: 50 x 50 x 4 mm
- Air bearings: NewWay (40 and 50 mm with 5 micrometer air gap)
- Lorentz actuators (Power consumption smaller than 80 mW)
- Encoders: Heidenhain (1 nm resolution)
- Positioning error servo system in x-, y- and z-direction: +/- 4, 3 and 2 nm
- Bandwidth horizontal air bearing system (x- and y-direction): 35 resp. 50 Hz
- Bandwidth elastically guided vertical axis (z-direction): 200 Hz
- Moving mass in the xy-plane: 8.5 kg
- Moving mass in z-direction: 100 g
