To keep on track with the trend towards miniaturization and looking forward to the upcoming market for Micro-Electro-Mechanical Systems (MEMS), the industry requires a fast 3D Coordinate Measuring Machine (CMM) for measuring small products in array with nanometer uncertainty.
To meet the above industry requirements, a 3D CMM with a low moving mass in x-, y- and z-direction and a volumetric expanded uncertainty of 25 nm (k=2) in a 50 x 50 x 4 mm measuring volume was realized and called NanoCMM.
This website shows the assembly, characteristics, construction details, calibration results, software and a movie of the NanoCMM.
More detailed information about the NanoCMM is included in the NanoCMM thesis.
