The NanoCMM can be equipped with different kind of probes. Probes that are successfully integrated are the Gannen Ultra precision 3D tactile probe and the Lion C5 capacitive sensor as shown below.
Gannen Ultra precision 3D tactile probe
The GANNEN probe is a 3D tactile scanning probe, designed for nanometrology on MEMS and artifacts. A low colliding mass and suspension stiffness prevents permanent work piece damage during measurements. The probe is available with tip diameters down to 50 micrometer. More information about this probe can be found on www.xpresspe.com.
Lion C5 capacitive sensor
More information about this sensor can be found on www.lionprecision.com.
